CDE ResMap 178

The CDE 4 point probe (4pp) ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). It has become an industry standard for cost effective resistivity measurement. Designed to meet the needs of process development and tool characterization engineers, this four point probe has the accuracy, repeatability and reliability required. Its large installed base is testimony to its performance, ease of use and low cost of ownership.

As a commonly used metrology unit in nanofabrication processes to characterize the thin film electrical properties, the tools capabilities include:

1) Sample size: 10mm to 150mm in diameter

2) Measurement range, 5mΩ to 5 MΩ

3) Accuracy: within 1%

4) Software: easy to use, mapping capability (2D and 3D contour)

5) Fast measurement and easy operation