PLU x00 Programmable Wafer Inspection Station

• The Mactronix PLU will transfer wafers one at a time from a 25 slot cassette to a self-centering chuck for visual and/or bright light inspection.
• User friendly keypad and four-line LCD screen allows for simple menu driven operation.
• Transfers are be accomplished through keypad commands and may be programmed for customized sequences.
• Versitile operation allows for six methods of wafer sorting:

Manual >>>>Series >>>>Interval
Random >>>>Load >>>>Unload

• The Technician level menu facilitates periodic cleaning and enables step by step machine diagnostics and testing.
• Wafer detection is achieved via vacuum sensors to inhibit accidental damage during robotic transfer.
• Space saving small footprint.
• Exhaust ported for clean room operation; 5 CFM max (non-process).
• Mactronix standard anti-corrosion package includes black hard anodizing of all aluminum parts.