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Furnace Loader
DFL-x00
- Automatic Furnace Loader with Wafer Transfer Station.ransfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading of wafers onto furnace.
- User friendly, menu driven programming for operator and maintenance mode provides complete flexibility. Easy ?point and click? teaching with graphical user interface. Extensive diagnostic and error-logging.
- Includes safety sensors and safeguards to prevent wafer breakage.
- Cassette Transfer Station can interface with ASYST/SMIF pod loading stations
