User friendly Windows based software Touch screen user interface Automatically aligns wafer flats to a preselected position and raises them in an inclined manner presenting them for viewing by the operator and/or camera. As with all Macronix wafer handling systems, the WLO can accommodate a wide variety of wafer cassettes/carriers. As a convenience, the foot print and weight of the WLO is small enough to be placed near any work environment. Cassette/carrier sensors located in the platform prevent the machine from operating if the required carriers are not present. RS232 communications port.

The Mactronix PLU will transfer wafers one at a time from a 25 slot cassette to a self-centering chuck for visual and/or bright light inspection. User friendly keypad and four-line LCD screen allows for simple menu driven operation. Transfers are be accomplished through keypad commands and may be programmed for customized sequences. Versitile operation allows for six methods of wafer sorting: Manual >>>>Series >>>>Interval Random >>>>Load >>>>Unload The Technician level menu facilitates periodic cleaning and enables step by step machine diagnostics and testing. Wafer detection is achieved via vacuum sensors to inhibit accidental damage during robotic transfer. Space saving small footprint. Exhaust ported for clean room operation; 5 CFM max (non-process). Mactronix standard anti-corrosion package includes black hard anodizing of all aluminum parts.

The MacLite Junior Series will transfer between two 25 Slot Carriers and one 50 slot Process boat. As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers. Fast & Smooth, featuring ramped speeds. A 50 wafer transfer is under 56 seconds. Operator interface is with a 12 key keypad with a 4 line LCD display. MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz. The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure). Single Board PC controlled. Sensors detect wafers and cassette or process carrier presence for safety. Flat alignment is maintained during transfer. Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored. All exposed aluminum parts are hard Black Anodized. Covers are powder covered aircraft grade aluminum. A “Technician Mode” is provided to facilitate preventative maintenance.  

The MacLite Junior Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette. As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon?, Metal, Quartz, Silicon Carbide, and Polysilicon carriers. Fast & Smooth, featuring ramped speeds. A 25 wafer transfer is under 40 seconds. Operator interface is with a 12 key keypad with a 4 line LCD display. MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz. The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure). Single Board PC controlled. Sensors detect wafers and cassette or process carrier presence for safety. Flat alignment is maintained during transfer. Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored. All exposed aluminum parts are hard Black Anodized. Covers are powder covered aircraft grade aluminum. A ?Technician Mode? is provided to facilitate preventative maintenance.

PCB-x00 Transfers 24 to 26 wafers between one standard pitch plastic cassette and one custom process boat in a contact back-to-back configuration. Configurable to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers. Machine interface is a 12 key pad with a 4 line LCD Display. Designed to limit particle contamination by using lead screw drive and stepper motor, clean room grade rails and bearings and electric boat sensors. All aluminum parts are hard black anodized for corrosion resistance. Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches. Lift system uses ramped speed controls for gentle pick-up and landing. Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation. Machine will not drop wafers in the event of a power failure and will prompt the operator through the “Recovery Mode” after power has been restored. A “Technician Mode” is provided to facilitate preventative maintenance.

EV2-400 The EV2 machine is a Windows? based, simple to operate, versatile automatic wafer sorting system. Fully customizable software to meet all of your sorting needs. Ergo friendly load station includes four cassette platforms mounted in vertical pairs on two independent elevator systems with a tilt feature that makes loading easy and stress free. Transfer cycles can be completed in a variety of methods, from manually, with full user instructions to fully automatic, utilizing pre-written routines. Wafer sorting/transfer can be made within a single 25 slot cassette and up to as many as four 25 slot cassettes at any one time. The system, in certain routines, will allow additional cassettes to be added as others are filled or emptied within the same sort/transfer cycle. Intuitive menu-driven interface via touchscreen or keyboard and mouse/trackball allows for easy recipe generation, provides full System Status and Error Logs and offers level specific secure password protection to keep production recipes safe from unwanted editing. Cassettes are mapped into memory and wafers are monitored by various sensors throughout the entire operation to ensure a safe transfer cycle. Wafers are secured by vacuum and detected via vacuum sensors during all robotic motions to inhibit accidental damage. Optical notch or flat detector permits custom orientation. Class 1 and Class 10 clean-room rated.

EV1-6800 The Mactronix EV1 is a Windows? based, simple to operate, versatile automatic wafer sorting system. Fully customizable software to meet all of your sorting needs. Ergo friendly load station includes two cassette platforms mounted vertically with a tilt feature that makes loading easy and stress free. Transfer cycles can be completed in a variety of methods, from manually, with full user instructions to fully automatic, utilizing pre-written routines. Wafer sorting/transfer can be made within a single 25 slot cassette or two 25 slot cassettes at any one time. Some routines will allow additional cassettes to be added as others are filled or emptied within the same sort/transfer cycle. Intuitive menu-driven interface via touchscreen or keyboard and mouse/trackball allows for easy recipe generation, provides full System Status, Error Logs and offers level specific secure password protection to keep production recipes safe from unwanted editing. Cassettes are mapped into memory and wafers are monitored by various sensors throughout the entire operation to ensure a safe transfer cycle. Wafers are secured by vacuum and detected via vacuum sensors during all robotic motions to inhibit accidental damage. Optical notch or flat detector permits custom orientation. Class 1 and Class 10 clean-room rated.  

DFL-x00 Automatic Furnace Loader with Wafer Transfer Station.ransfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading of wafers onto furnace. User friendly, menu driven programming for operator and maintenance mode provides complete flexibility. Easy ?point and click? teaching with graphical user interface. Extensive diagnostic and error-logging. Includes safety sensors and safeguards to prevent wafer breakage. Cassette Transfer Station can interface with ASYST/SMIF pod loading stations

HZN-x25 P5 The Horizon Junior Series V will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette. As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon?, Metal, Quartz, Silicon Carbide, and Polysilicon carriers. PLC controlled enhancing the transfer machine?s simplicity. With the push of a button, the machine transfers wafers safely and automatically. The Horizon Series V machines are designed to limit particle contamination by using a stepper motor w/lead screw, ?clean room grade? rails and bearings and a 1.25? non-process exhaust port. The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure). All aluminum parts are hard black anodized for corrosion resistance. Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches. Lift system uses ramped speed controls for gentle pick-up and landing. Pressure sensors are used both for personal safety and to prevent wafer damage by inhibiting machine operation. Retainers default to closed position to prevent the dropping of wafers in the event of a power disruption or a loss of air pressure or both. A ?Maintenance/Cleaning Mode? is provided to facilitate preventative maintenance. The Series V machines have been tested with up to 50,000 volts of electrostatic discharge without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.

AIS-x00 The Automatic Wafer Inspector (AIS) machine presents wafers for light box inspection with the option for rejected wafers to be placed in lower 25-slot cassette. User friendly, menu driven programming for operator and maintenance mode provides complete flexibility. Unloading may be accomplished through keypad commands and may be pre-programmed for customized sequences. Joystick for Tilt/Rotate. Wafers are memory mapped and monitored while in the cassettes and are vacuum sensed and monitored during robotic transfers to inhibit accidental damage. Specific flat orientation is achieved by one of four programmed positions. The machine has a small footprint and is exhaust ported for clean room operation. Elevator platform indexes for easy loading and unloading of wafers. Wafer tilted 65 degrees under ?Light Cube? for 1x visual inspection. Light box enclosed on three sides for optimal inspection. Machine construction is from Mactronix standard anticorrosion package (all aluminum parts are black hard anodized).